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1

A low-noise measurement system for scanning thermal microscopy resistive nanoprobes based on a transformer ratio-arm bridge

Świątkowski, Michał Jakub, Wojtuś, Arkadiusz, Wielgoszewski, Grzegorz, Rudek, Maciej, Piasecki, Tomasz, Jozwiak, Grzegorz, Gotszalk, Teodor

Journal:

Measurement Science and Technology

Année:

2017

Langue:

english

Fichier:

PDF, 922 KB

english, 2017

2

Standard and self-sustained magnetron sputtering deposited Cu films investigated by means of AFM and XRD

A. Wiatrowski, W.M. Posadowski, G. Jóźwiak, J. Serafińczuk, R. Szeloch, T. Gotszalk

Journal:

Microelectronics Reliability

Année:

2011

Langue:

english

Fichier:

PDF, 810 KB

english, 2011

3

Microfabricated resistive high-sensitivity nanoprobe for scanning thermal microscopy

Wielgoszewski, G., Sulecki, P., Gotszalk, T., Janus, P., Szmigiel, D., Grabiec, P., Zschech, E.

Journal:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

Année:

2010

Langue:

english

Fichier:

PDF, 797 KB

english, 2010

4

A novel piezoresistive microprobe for atomic and lateral force microscopy

Teodor Gotszalk, P.B. Grabiec, I.W. Rangelow

Journal:

Sensors and Actuators A: Physical

Année:

2005

Langue:

english

Fichier:

PDF, 1.03 MB

english, 2005

5

Local anodic oxidation by atomic force microscopy for nano-Raman strain measurements on silicon–germanium thin films

Krzysztof Kolanek, Peter Hermann, Piotr T. Dudek, Teodor Gotszalk, Dmytro Chumakov, Martin Weisheit, Michael Hecker, Ehrenfried Zschech

Journal:

Thin Solid Films

Année:

2010

Langue:

english

Fichier:

PDF, 869 KB

english, 2010

6

SPIE Proceedings [SPIE 14th International Conference on Optical and Electronic Sensors - Gdansk, Poland (Sunday 19 June 2016)] 14th International Conference on Optical and Electronic Sensors - Innovative multi-cantilever array sensor system with MOEMS read-out

Jasiński, Piotr, Gołębiowski, Jacek, Jachowicz, Ryszard S., Nowakowski, Antoni Z., Ivaldi, F., Bieniek, T., Janus, P., Grabiec, P., Majstrzyk, W., Kopiec, D., Gotszalk, T.

Année:

2016

Langue:

english

Fichier:

PDF, 907 KB

english, 2016

7

Characterization of a cantilever with an integrated deflection sensor

R. Linnemann, T. Gotszalk, L. Hadjiiski, I.W. Rangelow

Journal:

Thin Solid Films

Année:

1995

Langue:

english

Fichier:

PDF, 770 KB

english, 1995

8

Scanning Thermal Microscopy in Microsystem Reliability Analysis

R.F. Szeloch, T.P. Gotszalk, P. Janus

Journal:

Microelectronics Reliability

Année:

2002

Fichier:

PDF, 1.90 MB

2002

9

Study of long-term stability of ohmic contacts to GaN

E. Kaminska, K. Golaszewska, A. Piotrowska, A. Kuchuk, R. Kruszka, E. Papis, R. Szeloch, P. Janus, T. Gotszalk, A. Barcz

Journal:

physica status solidi (c)

Année:

2004

Langue:

english

Fichier:

PDF, 260 KB

english, 2004

10

Application of piezoelectric tuning forks in liquid viscosity and density measurements

K. Waszczuk, T. Piasecki, K. Nitsch, T. Gotszalk

Journal:

Sensors and Actuators B: Chemical

Année:

2011

Langue:

english

Fichier:

PDF, 755 KB

english, 2011

11

SNOM/AFM microprobe integrated with piezoresistive cantilever beam for multifunctional surface analysis

P. Grabiec, T. Gotszalk, J. Radojewski, K. Edinger, N. Abedinov, I.W. Rangelow

Journal:

Microelectronic Engineering

Année:

2002

Langue:

english

Fichier:

PDF, 685 KB

english, 2002

12

Fabrication of multipurpose AFM/SCM/SEP microprobe with integrated piezoresistive deflection sensor and isolated conductive tip

T. Gotszalk, P. Grabiec, F. Shi, P. Dumania, P. Hudek, I.W. Rangelow

Journal:

Microelectronic Engineering

Année:

1998

Langue:

english

Fichier:

PDF, 398 KB

english, 1998

13

Efficient broken line fitting procedure for analysis of force spectroscopy curves in chemical force microscopy

Jóźwiak, G., Masalska, A., Gotszalk, T., Schroeder, G.

Journal:

Journal of Applied Physics

Année:

2013

Langue:

english

Fichier:

PDF, 931 KB

english, 2013

14

Application of quartz tuning forks for detection of endotoxins and Gram-negative bacterial cells by monitoring of Limulus Amebocyte Lysate coagulation

Chałupniak, Andrzej, Waszczuk, Karol, Hałubek-Głuchowska, Katarzyna, Piasecki, Tomasz, Gotszalk, Teodor, Rybka, Jacek

Journal:

Biosensors and Bioelectronics

Année:

2014

Langue:

english

Fichier:

PDF, 1.17 MB

english, 2014

15

SPIE Proceedings [SPIE SPIE Scanning Microscopies - Monterey, California, United States (Tuesday 16 September 2014)] Scanning Microscopies 2014 - Shear force microscopy using piezoresistive cantilevers in surface metrology

Postek, Michael T., Newbury, Dale E., Platek, S. Frank, Maugel, Tim K., Gotszalk, Teodor, Kopiec, Daniel, Sierakowski, Andrzej, Janus, Paweł, Grabiec, Piotr, Rangelow, Ivo W.

Année:

2014

Langue:

english

Fichier:

PDF, 729 KB

english, 2014

16

Fabrication of self-actuated piezoresistive thermal probes

Hofer, Manuel, Ivanov, Tzvetan, Rudek, Maciej, Kopiec, Daniel, Guliyev, Elshad, Gotszalk, Teodor P., Rangelow, Ivo W.

Journal:

Microelectronic Engineering

Année:

2015

Langue:

english

Fichier:

PDF, 1.61 MB

english, 2015

17

[IEEE 2014 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO) - Taipei, Taiwan (2014.10.27-2014.10.31)] 2014 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO) - Quality factor and resonant frequency measurement by ARMA process identification of randomly excited MEMS/NEMS cantilever

Jozwiak, Grzegorz, Kopiec, Daniel, Majstrzyk, Wojciech, Gotszalk, Teodor, Grabiec, Piotr

Année:

2014

Langue:

english

Fichier:

PDF, 292 KB

english, 2014

18

SPIE Proceedings [SPIE 28th European Mask and Lithography Conference (EMLC 2012) - Dresden, Germany (Tuesday 17 January 2012)] 28th European Mask and Lithography Conference - Optimization method of photolithography process by means of atomic force microscopy

Sierakowski, Andrzej, Janus, Paweł, Kopiec, Daniel, Nieradka, Konrad, Domanski, Krzysztof, Grabiec, Piotr, Gotszalk, Teodor, Behringer, Uwe F.W., Maurer, Wilhelm

Année:

2012

Langue:

english

Fichier:

PDF, 5.52 MB

english, 2012

19

High-resolution and wide-bandwidth light intensity fiber optic displacement sensor for MEMS metrology

Orłowska, Karolina, Świątkowski, Michał, Kunicki, Piotr, Kopiec, Daniel, Gotszalk, Teodor

Journal:

Année:

2016

Langue:

english

Fichier:

PDF, 1.33 MB

english, 2016

20

[IEEE ESSDERC 2016 - 46th European Solid-State Device Research Conference - Lausanne, Switzerland (2016.9.12-2016.9.15)] 2016 46th European Solid-State Device Research Conference (ESSDERC) - New approach for a multi-cantilever arrays sensor system with advanced MOEMS readout

Ivaldi, F., Bieniek, T., Janus, P., Zajac, J., Grabiec, P., Majstrzyk, W., Kopiec, D., Gotszalk, T.

Année:

2016

Langue:

english

Fichier:

PDF, 2.84 MB

english, 2016

21

Magnetoelectric versus thermal actuation characteristics of shear force AFM probes with piezoresistive detection

Sierakowski, Andrzej, Kopiec, Daniel, Majstrzyk, Wojciech, Kunicki, Piotr, Janus, Paweł, Dobrowolski, Rafał, Grabiec, Piotr, Rangelow, Ivo W, Gotszalk, Teodor

Journal:

Measurement Science and Technology

Année:

2017

Langue:

english

Fichier:

PDF, 3.16 MB

english, 2017

22

Quasi in-situ observation of the elastic properties changes of the graphene–low-density polyethylene composites

Gajewski, Krzysztof, Szymański, Witold, Kaczorowski, Witold, Niedzielski, Piotr, Gotszalk, Teodor

Journal:

Diamond and Related Materials

Année:

2018

Langue:

english

Fichier:

PDF, 1.41 MB

english, 2018

23

Thermomechanically and electromagnetically actuated piezoresistive cantilevers for fast-scanning probe microscopy investigations

Majstrzyk, W., Ahmad, A., Ivanov, Tzv., Reum, A., Angelow, T., Holz, M., Gotszalk, T., Rangelow, I.W.

Journal:

Sensors and Actuators A: Physical

Année:

2018

Langue:

english

Fichier:

PDF, 2.53 MB

english, 2018

24

Thermal nanometrology using piezoresistive SThM probes with metallic tips

Janus, Paweł, Sierakowski, Andrzej, Rudek, Maciej, Kunicki, Piotr, Dzierka, Andrzej, Biczysko, Paweł, Gotszalk, Teodor

Journal:

Ultramicroscopy

Année:

2018

Langue:

english

Fichier:

PDF, 2.08 MB

english, 2018

25

Electromagnetic cantilever reference for the calibration of optical nanodisplacement systems

Majstrzyk, W., Mognaschi, M.E., Orłowska, K., Di Barba, P., Sierakowski, A., Dobrowolski, R., Grabiec, P., Gotszalk, T.

Journal:

Sensors and Actuators A: Physical

Année:

2018

Langue:

english

Fichier:

PDF, 1.22 MB

english, 2018

26

Resolution improvement in electromagnetically actuated Wheatstone bridge configuration micromechanical resonators

Moczała, Magdalena, Sierakowski, Andrzej, Babij, Michał, Kwoka, Krzysztof, Dobrowolski, Rafał, Radojewski, Jacek, Piasecki, Tomasz, Gotszalk, Teodor

Journal:

Sensors and Actuators A: Physical

Année:

2018

Langue:

english

Fichier:

PDF, 1.22 MB

english, 2018

27

Tip-based nano-manufacturing and -metrology

Gotszalk, Teodor, Jóźwiak, Grzegorz, Radojewski, Jacek, Fröhlich, Thomas, Füssl, Roland, Manske, Eberhard, Holz, Mathias, Ivanov, Tzvetan, Ahmad, Ahmad, Rangelow, Ivo W.

Journal:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

Année:

2019

Langue:

english

Fichier:

PDF, 2.96 MB

english, 2019

28

Tip-based nano-manufacturing and -metrology

Gotszalk, Teodor, Jóźwiak, Grzegorz, Radojewski, Jacek, Fröhlich, Thomas, Füssl, Roland, Manske, Eberhard, Holz, Mathias, Ivanov, Tzvetan, Ahmad, Ahmad, Rangelow, Ivo W.

Journal:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

Année:

2019

Fichier:

PDF, 2.96 MB

2019

29

Origin and anomalous behavior of dominant defects in 4H-SiC studied by conventional and Laplace deep level transient spectroscopy

Gelczuk, Å., DÄbrowska-Szata, M., Kolkovsky, Vl., Sochacki, M., Szmidt, J., Gotszalk, T.

Journal:

Journal of Applied Physics

Année:

2020

Langue:

english

Fichier:

PDF, 848 KB

english, 2020

30

Gas-Sensitive Properties of Nitrogen-Rich Carbon Nitride Films

L. M. Zambov, C. Popov, N. Abedinov, M. F. Plass, W. Kulisch, T. Gotszalk, P. Grabiec, I. W. Rangelow, R. Kassing

Journal:

Advanced Materials

Année:

2000

Langue:

english

Fichier:

PDF, 250 KB

english, 2000

31

ChemInform Abstract: Gas-Sensitive Properties of Nitrogen-Rich Carbon Nitride Films.

Ludmil M. Zambov, Cyril Popov, Nikolai Abedinov, Martin F. Plass, Wilhelm Kulisch, Teodor Gotszalk, Peter Grabiec, Ivo W. Rangelow, Rainer Kassing

Journal:

Année:

2000

Fichier:

PDF, 28 KB

2000

32

Nano-line width control and standards using Lateral Pattern Definition technique

Michał Zaborowski, Dariusz Szmigiel, Teodor Gotszalk, Katerina Ivanova, Yanko Sarov, Tzvetan Ivanov, Burkhard E. Volland, Ivo W. Rangelow, Piotr Grabiec

Journal:

Microelectronic Engineering

Année:

2006

Langue:

english

Fichier:

PDF, 280 KB

english, 2006

33

Combined shear-force/field emission microscope for local electrical surface investigation

Andrzej Sikora, Teodor Gotszalk, Roman Szeloch

Journal:

Microelectronic Engineering

Année:

2007

Langue:

english

Fichier:

PDF, 1.00 MB

english, 2007

34

Vertical devices of self-assembled hybrid organic/inorganic monolayers based on tungsten polyoxometalates

E. Makarona, E. Kapetanakis, D.M. Velessiotis, A. Douvas, P. Argitis, P. Normand, T. Gotszalk, M. Woszczyna, N. Glezos

Journal:

Microelectronic Engineering

Année:

2008

Langue:

english

Fichier:

PDF, 352 KB

english, 2008

35

Thermally driven piezoresistive cantilevers for shear-force microscopy

M. Woszczyna, T. Gotszalk, P. Zawierucha, M. Zielony, Tzv. Ivanow, K. Ivanowa, Y. Sarov, N. Nikolov, J. Mielczarski, E. Mielczarska, I.W. Rangelow

Journal:

Microelectronic Engineering

Année:

2009

Langue:

english

Fichier:

PDF, 398 KB

english, 2009

36

Quantitative force and mass measurements using the cantilever with integrated actuator and deflection detector

M. Woszczyna, P. Zawierucha, M. Świątkowski, T. Gotszalk, P. Grabiec, N. Nikolov, J. Mielczarski, E. Mielczarska, N. Glezos, Tzv. Ivanow, K. Ivanowa, Y. Sarov, I.W. Rangelow

Journal:

Microelectronic Engineering

Année:

2009

Langue:

english

Fichier:

PDF, 420 KB

english, 2009

37

Novel SThM nanoprobe for thermal properties investigation of micro- and nanoelectronic devices

P. Janus, D. Szmigiel, M. Weisheit, G. Wielgoszewski, Y. Ritz, P. Grabiec, M. Hecker, T. Gotszalk, P. Sulecki, E. Zschech

Journal:

Microelectronic Engineering

Année:

2010

Langue:

english

Fichier:

PDF, 516 KB

english, 2010

38

Evaluation of Pseudomonas aeruginosa biofilm formation using piezoelectric tuning forks mass sensors

K. Waszczuk, G. Gula, M. Swiatkowski, J. Olszewski, Z. Drulis-Kawa, J. Gutowicz, T. Gotszalk

Journal:

Procedia Engineering

Année:

2010

Langue:

english

Fichier:

PDF, 413 KB

english, 2010

39

The spring constant calibration of the piezoresistive cantilever based biosensor

G. Jóźwiak, D. Kopiec, P. Zawieruch, T. Gotszalk, P. Janus, P. Grabiec, I.W. Rangelow

Journal:

Procedia Engineering

Année:

2010

Langue:

english

Fichier:

PDF, 530 KB

english, 2010

40

A novel method for simultaneous readout of static bending and multimode resonance-frequency of microcantilever-based biochemical sensors

Konrad Nieradka, Teodor Paweł Gotszalk, Grzegorz Marek Schroeder

Journal:

Procedia Engineering

Année:

2010

Fichier:

PDF, 5.98 MB

2010

41

Investigation of aminotrimethoxysilanes and organic acids functionalized surface interactions: Theoretical and atomic force microscopy studies

Agata Masalska, Teodor Gotszalk, Radosław Pankiewicz, Grzegorz Schroeder

Journal:

Surface Science

Année:

2010

Langue:

english

Fichier:

PDF, 1.46 MB

english, 2010

42

Refractive index modulation in the polyurethane films containing diazo sulfonamide chromophores

E. Ortyl, S. Kucharski, T. Gotszalk

Journal:

Thin Solid Films

Année:

2005

Langue:

english

Fichier:

PDF, 178 KB

english, 2005

43

Tunneling/shear force microscopy using piezoelectric tuning forks for characterization of topography and local electric surface properties

MirosŁaw Woszczyna, PaweŁ Zawierucha, Agata Masalska, Grzegorz Jóźwiak, Elżbieta Staryga, Teodor Gotszalk

Journal:

Ultramicroscopy

Année:

2010

Langue:

english

Fichier:

PDF, 605 KB

english, 2010

44

Investigations of local electrical properties using tunneling/atomic force microscope with a quartz tuning fork nearfield sensor

Mirosław Woszczyna, Paweł Zawierucha, Agata Masalska, Teodor Gotszalk

Journal:

Année:

2008

Langue:

english

Fichier:

PDF, 847 KB

english, 2008

45

Scanning probe sharp tip formation for IC integration using mesa technique

P.B. Grabiec, Feng Shi, P. Hudek, T. Gotszalk, M. Zaborowski, P. Dumania, I.W. Rangelow

Journal:

Microelectronic Engineering

Année:

1997

Langue:

english

Fichier:

PDF, 394 KB

english, 1997

46

A design and fabrication of a 3D force sensitive microprobe for surface characterization

P.B. Grabiec, R. Sunyk, F. Shi, G. Popovic, T. Gotszalk, P. Hudek, P. Dumania, I.W. Rangelow

Journal:

Microelectronic Engineering

Année:

1999

Langue:

english

Fichier:

PDF, 1.49 MB

english, 1999

47

The integration of CMOS with plasma-enhanced micromachining

P.B Grabiec, T Gotszalk, F Shi, P Hudek, P Dumania, I.W Rangelow

Journal:

Surface and Coatings Technology

Année:

1997

Langue:

english

Fichier:

PDF, 890 KB

english, 1997

48

Calibration and examination of piezoresistive Wheatstone bridge cantilevers for scanning probe microscopy

Teodor Gotszalk, Piotr Grabiec, Ivo W. Rangelow

Journal:

Ultramicroscopy

Année:

2003

Langue:

english

Fichier:

PDF, 400 KB

english, 2003

49

Quantum size aspects of the piezoresistive effect in ultra thin piezoresistors

Tzv. Ivanov, T. Gotszalk, T. Sulzbach, I.W. Rangelow

Journal:

Ultramicroscopy

Année:

2003

Langue:

english

Fichier:

PDF, 589 KB

english, 2003

50

Piezoresistive sensors for scanning probe microscopy

Teodor Gotszalk, Piotr Grabiec, Ivo W. Rangelow

Journal:

Ultramicroscopy

Année:

2000

Langue:

english

Fichier:

PDF, 1011 KB

english, 2000